AGR@ICN2 NanoFrazor Technology – Technical Overview

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By Dr Anya Grushina, Heidelberg Instruments Nano’s Technical Communications



NanoFrazor (thermal scanning probe) lithography uses a heatable tip that can pattern and simultaneously inspect nanostructures. NanoFrazor can pattern very high-resolution (< 10 nm half-pitch) nanostructures by locally evaporating resist materials. The structures are inspected by the cold tip before or during with the patterning, enabling stitching and markerless overlay with sub-5 nm accuracy. Thermal scanning probe lithography is compatible with all standard pattern transfer processes.

In addition to standard features offered by e-beam, NanoFrazor has several unique capabilities. Since no charged particles are involved in the patterning process, NanoFrazor is free from charging and proximity effect, it does not damage the sample material or implant charges in the dielectric layer. Such non-invasive lithography yields devices with superior performance. Another unique feature of the NanoFrazor is 3D/grayscale patterning capability. The in-situ imaging capability enables implementation of feedback algorithms. As a result, NanoFrazor can pattern smooth grayscale structures with 1 nm vertical resolution in a straight-forward manner. NanoFrazor can also be used for fabrication of superior devices from 2D materials: It can be used to shape the flakes with high precision; to make high-quality contacts on 2D materials; to induce precisely controlled local strain; to locally define the doping through absorption of charged defects from a controlled environment. NanoFrazor also has an integrated direct laser sublimation module for rapid patterning of coarse features such as electrodes and contact pads.

This webinar will consist of an overview of the key features and applications of the NanoFrazor technology and an open discussion of how its unique capabilities can address relevant fabrication bottlenecks.


Hosted by Prof. Aitor Mugarza, Atomic Manipulation and Spectroscopy Group Leader


Register here